High-Purity Alumina Ceramics (Al₂O₃)

99% · 99.5% · 99.7% · 99.8% grades — outstanding electrical insulation, plasma and wear resistance, and the most widely specified ceramic in semiconductor process equipment.

High purity alumina ceramic precision components
Material Overview

The Workhorse of Semiconductor Process Chambers

Alumina combines high hardness, excellent dielectric strength and strong resistance to plasma erosion and chemical attack. Our high-purity 99.7% and 99.8% grades minimize particle generation and ionic contamination — the decisive factors for wafer-exposed components.

  • Grades from 99% to 99.8% Al₂O₃ with low Fe, Na and K content
  • Densities up to 3.95 g/cm³, fine-grained microstructure
  • Diamond-ground surfaces to Ra 0.4 µm and ±0.005 mm tolerances
  • Metallization (Mo-Mn / W) and brazing available on request
  • Custom sizes from 1 mm features up to 600 mm plates
Purity Grades

Grade Overview & Typical Properties

Property (typical) DA-99 DA-99.5 DA-99.7 DA-99.8
Al₂O₃ content (≥ %)99.099.599.799.8
Bulk density (g/cm³)3.823.883.923.95
Flexural strength (MPa)340370400420
Thermal conductivity (W/m·K, 20 °C)26272830
C.T.E. (10⁻⁶/K, 20–1000 °C)8.18.07.97.8
Dielectric strength (kV/mm)16171818
Hardness (HRA)8888.58989.5
Max. service temperature (°C, inert)1650170017001750

Typical values for reference; custom specifications and full test reports available on request.

Product Series by Application

Alumina Components by Industry

Semiconductor

Chamber & Wafer-Handling Parts

Plasma chamber liners and shields, showerhead supports, wafer boat pins, robotic arm end effectors, vacuum chuck insulators, gas distribution rings and ESC core parts in 99.7%–99.8% grades.

Electrical & Thermal

Insulation Components

Feedthroughs, standoffs, tube and rod insulators, burner nozzles, heating-element supports and vacuum-interrupter parts where high dielectric strength and temperature stability are required.

Wear & Fluid

Mechanical Components

Seal rings and discs, pump plungers and sleeves, spray and sandblasting nozzles, thread guides, bearings and precision balls for abrasive or corrosive service.

Photovoltaic & Thermal

Furnace & Process Tubes

Diffusion furnace tubes, thermocouple protection tubes, crucibles, kiln rollers and boats for photovoltaic cell manufacturing and high-temperature processes.

LED & Optoelectronics

Optical & Carrier Parts

Polished alumina carriers, LED package parts, laser-cavity reflectors and sapphire-growth components with high surface finish and purity.

Medical

Bio-Inert Components

High-purity alumina joint interfaces and instrument components with proven bio-compatibility and a polished, low-friction surface.

Frequently Asked Questions

Alumina Ceramic Questions, Answered

Which alumina purity grade should I specify?

Match the grade to how close the part sits to the wafer and how aggressive the environment is. DA-99 (99%) is the economical choice for general insulation, wear parts and furnace furniture. DA-99.5 suits most industrial, LED and photovoltaic hardware. DA-99.7 and DA-99.8 are specified for wafer-exposed semiconductor parts, where sodium, potassium and iron contamination and particle generation have to be minimised.

Is 99.8% alumina worth the extra cost over 99.5%?

In a wafer fab, usually yes; in a general industrial application, usually no. The higher price reflects purer powder, tighter sintering control and more inspection. What you get is lower alkali and iron content, higher density (3.95 vs 3.88 g/cm³), higher flexural strength (420 vs 370 MPa) and fewer particles — precisely the factors that drive killer defects on a wafer. If the component never sees a wafer or a plasma chamber, 99% or 99.5% is normally the better commercial decision.

What sizes and tolerances can you hold in alumina?

We sinter and machine parts with features from roughly 1 mm up to 600 mm plates. As-fired dimensions are typically held to about ±1%, while diamond-ground features are held to ±0.005 mm with a surface finish of Ra 0.4 µm. Flatness, parallelism and perpendicularity are controlled to your drawing.

Can alumina be metallized or brazed?

Yes. We apply Mo-Mn or tungsten metallization and can braze to Kovar, stainless steel and copper for feedthroughs, vacuum-interrupter parts and ceramic-to-metal assemblies. Metallized alumina is normally supplied in the 99.5%–99.8% grades.

Does alumina resist plasma inside an etch chamber?

Yes — alumina is one of the two workhorse plasma-facing materials, the other being silicon carbide. Its erosion rate in fluorine and chlorine chemistries is low, and the 99.7%–99.8% grades keep metal contamination inside the particle budget. Where the plasma is very aggressive or the part also sees severe thermal shock, silicon carbide is the better answer.

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